Scanning Electron Microscopes
JEOL JSM-7500FA
The JSM-7500FA is an analytical Field Emission (cold FEG) SEM featuring enhanced performance, ease of operation, and energy efficiency. It offers a high resolution also at low kV.
Zeiss Sigma VP
The Sigma has a Schottky FEG, which provides good resolution and the Gemini column offers ease of use. The Sigma VP has a variable pressure mode for poorly conductive samples.
Zeiss EVO HD 15
The EVO HD 15 has an enhanced LaB6 emitter, which provides a good resolution also at low kV. It has three operating modes: high vacuum (HV), variable pressure (VP), and enviromental mode (EP). Enviromental mode goes up to 2000 Pa for imaging also at humid atmosphere.
Joinlty operated with Micro and Nanorobotics group (contact Adj. Prof. Quan Zhou) and located in TUAS-building.
Comparison of SEMs
| JEOL JSM-7500FA | Zeiss Sigma VP | Zeiss EVO HD 15 | |
|---|---|---|---|
| Emitter | Cold FEG | Schottky FEG | LaB6 "HD" |
| Detectors | In-column SE ETSE BSE (2 segment) EDX (JEOL) |
In-column SE ETSE BSE (5 segment) VPSE STEM |
ETSE BSE (5 segment) VPSE EPSE STEM |
| Resolution | 0.6 nm @ 30 kV 1.4 nm @ 1 kV |
1.3 nm @ 20 kV 2.8 nm @ 1 kV 2.5 nm @ 30 kV (VPSE) |
1.9 nm @ 30 kV 8 nm @ 1 kV 3 nm @ 30 kV (VPSE) |
| Analytical | Yes, EDX | No | No |
| Variable pressure (VP) | No | Yes, up to 133 Pa (N2) | Yes, up to 133 Pa (H2O or N2) |
| Environmental (EP) | No | No | Yes, up to 3000 Pa (H2O or N2) |
| Cooling stage | No | No | Yes |
Quick reference: SEMs
JEOL JSM-7500FA
- Highest resolution
- Analytical (EDX)
- Only high vacuum
- Small sample size
Zeiss Sigma VP
- High resolution
- High vacuum and variable pressure modes
- Large sample size
- STEM
Zeiss EVO HD15
- Medium resolution
- Environmental SEM (high vacuum, variable pressure, and extended pressure modes)
- Large sample size
- STEM