Zeiss EVO HD15
The EVO HD 15 has an enhanced LaB6 emitter, which provides a good resolution also at low kV. It has three operating modes: high vacuum (HV), variable pressure (VP), and enviromental mode (EP). Enviromental mode goes up to 2000 Pa for imaging also at humid atmosphere.
Joinlty operated with Micro and Nanorobotics group (contact Adj. Prof. Quan Zhou) and located in TUAS-building.
| Manufacturer | Zeiss |
|---|---|
| Model | EVO HD15 |
| Emitter | LaB6 with "HD" technology |
| Installation | 2012 |
| Detectors | ETSE BSE (5 segment) VPSE EPSE STEM |
| Resolution | 1.9 nm @ 30 kV 3 nm @ 30 kV (1 nA) 5 nm @ 3 kV 8 nm @ 1 kV 3 nm @ 30 kV (VPSE) |
| Acceleration voltage | 0.2 - 30 kV |
| Probe current | 0.5 pA - 1 uA |
| Operating modes | High vacuum (10-5 Pa) Variable pressure (10 - 133 Pa, N2, air, H2O) Extended pressure (10 - 3000 Pa, N2, air, H2O) |
| Stage | Motorized 5 axis (compucentric) X & Y 125 mm Z 50 mm T -10 - 90° R 360° |
| Specimen size | max. 250 mm diameter max. 145 mm height |
| Contact | Adj. Prof. Quan Zhou (Micro and Nanorobotics group) Prof. Janne Ruokolainen (NMC) |
| Technical staff | M.Sc. Ville Liimatainen (Micro and Nanorobotics group) M.Sc. Juuso Korhonen (NMC) M.Sc. Panu Hiekkataipale (NMC) Dr. Jani Seitsonen (NMC) |
| Pricing | T.B.A. |
| Availability | T.B.A. |
Photos and micrographs
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Zeiss Sigma VP installed in NMC. |
Photograph inside the microscope. |
 Carbon nanotube film imaged with a Zeiss EVO HD15 at Zeiss Cambridge. |
 Nanocellulose fibrils imaged without coating at Zeiss Cambridge. |
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Quick reference: SEMs
JEOL JSM-7500FA
- Highest resolution
- Analytical (EDX)
- Only high vacuum
- Small sample size
Zeiss Sigma VP
- High resolution
- High vacuum and variable pressure modes
- Large sample size
- STEM
Zeiss EVO HD15
- Medium resolution
- Environmental SEM (high vacuum, variable pressure, and extended pressure modes)
- Large sample size
- STEM