Zeiss Sigma VP
The Sigma has a Schottky FEG, which provides good resolution and the Gemini column offers ease of use. The Sigma VP has a variable pressure mode for poorly conductive samples.
Joinlty operated with Micro and Nanorobotics group and located in NMC.
| Manufacturer | Zeiss |
|---|---|
| Model | Sigma VP |
| Emitter | Schottky FEG |
| Installation | 2012 |
| Detectors | In-column SE ETSE BSE (5 segment) VPSE STEM |
| Resolution | 1.3 nm @ 20 kV 2.8 nm @ 1 kV 2.5 nm @ 30 kV (VPSE) |
| Acceleration voltage | 0.1 - 30 kV |
| Probe current | 4 pA - 20 nA |
| Operating modes | High vacuum (10-5 Pa) Variable pressure (2-133 Pa, N2) |
| Stage | Motorized 5 axis (compucentric) X & Y 125 mm Z 50 mm T 0 - 90° R 360° |
| Specimen size | max. 250 mm diameter max. 145 mm height |
| Contact | Prof. Janne Ruokolainen (requests for collaboration and usage) Adj. Prof. Quan Zhou (Micro and Nanorobotics group) |
| Technical staff | M.Sc. Juuso Korhonen (technical issues) M.Sc. Panu Hiekkataipale (user training) Dr. Jani Seitsonen (user training) M.Sc. Ville Liimatainen (Micro and Nanorobotics group) |
| Pricing | Upon request from Prof. Janne Ruokolainen |
| Availability | The instrument is available for outside users, such as other departments, universities, VTT, and industry. It is also possible to buy imaging service. Contact Prof. Janne Ruokolainen for details. |
Photos and micrographs
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Zeiss Sigma VP installed in NMC. |
Photograph inside the microscope. |
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Carbon nanotube film imaged with a Zeiss Sigma VP during Scandem 2011.
Nanocellulose fibrils imaged without coating during Scandem 2011.Quick reference: SEMs
JEOL JSM-7500FA
- Highest resolution
- Analytical (EDX)
- Only high vacuum
- Small sample size
Zeiss Sigma VP
- High resolution
- High vacuum and variable pressure modes
- Large sample size
- STEM
Zeiss EVO HD15
- Medium resolution
- Environmental SEM (high vacuum, variable pressure, and extended pressure modes)
- Large sample size
- STEM